|
INTRODUCTION
TR7900Q SII는 반도체 및 첨단 패키징 산업에 적합한 2.5μm 초고해상도와 25MP 이미징 기술을 갖추었습니다. AI 기반 알고리즘 및 측정 기능은 스마트 3D AOI 솔루션의 효율성을 극대화시킵니다. 3D SEMI AOI는 로더/언로더와 연동하여 스트립 및 매거진을 쉽게 다룰 수 있습니다. Stop-and-Go 3D AOI는 다이 본딩, 볼 본딩, 리본 본드, 웨지 본드, SiP, 언더필, SMD, 범프 및 솔더 조인트를 검사할 수 있습니다. 스마트 팩토리 AOI 솔루션은 와이어 직경을 최대 15μm(0.6m)까지 검사할 수 있습니다.
• 와이어 본딩 및 다이 본딩을 위한 첨단 패키지 불량 검사
• 2.5μm의 Metrology-grade* 측정 기능을 갖춘 고해상도 3D AOI
• 매거진 핸들링을 위한 로더 및 언로더 연동
• AI알고리즘을 기반으로 한 와이어 불량 검출
• Au, Al, Ag, Cu 와이어를 15 μm까지 검사
• 본드 검사: 볼 본드, 웨지 본드 및 리본 본드
• SWIR(Shortwave Infrared) 조명으로 내부 cracks and chipping* 감지
• Clean Room Class 1000 - ISO Class 6 (ISO 14644-1)
*옵션 모듈
Optical System
Imaging Method |
Stop-and-Go Imaging |
Top Camera |
25 Mpix |
Imaging Resolution |
2.5 µm |
Lighting |
Multi-phase True Color LED |
3D Technology |
Quad Digital Fringe Projectors |
Max. 3D Height Range |
15 mm |
Motion Table & Control
X Axis Control |
Ball Screw + AC Servo Motor or Linear Motor |
Y Axis Control |
Dual Ball Screw + AC Servo Motor or Dual Linear Motor (Optional) |
Z Axis Control |
Ball Screw + AC Servo Motor (Reducer Optional) |
X-Y Axis Resolution |
0.1 µm |
Board Handling
Max. Stack Magazine Qty. |
3 Magazines (based on Magazine width 125 mm) |
Magazine Dimension |
Width: 50 - 175 mm
Length: 120 - 320 mm
Height: 80 - 150 mm
|
Strip Dimension |
Width *: 35 - 150 mm
Length: 100 - 285 mm
Thickness: 0.1 - 1.5 mm
* When the strip width is between 35-54 mm, will require a special design.
|
Max. Strip Weight |
0.5 kg |
Strip Carrier / Fixing |
Belt Conveyor |
Top Clearance |
7 mm |
Bottom Clearance |
10 mm |
Edge Clearance |
3 mm |
Inspection Functions
Die Bonding |
Missing
Orientation
Rotation
Shift
Tilted
Chipping
Crack
Scratch
Foreign Material
Bond line thickness
Epoxy on Die
Epoxy Coverage
Epoxy Height
|
Wire Bonding |
Broken
Short
Sweep/Sink
Missing
Sway
Collapse
Loop Height
Sagged Wire
Cross Wire Gap
Wire Tracing
Ball Bond Diameter
Ball Placement
Stitch Width
Stitch Coverage over Ball
Ball-off Pad
Ball touch Pad Distance
Clubbed Ball
Ball Thickness
Lifted Ball
Low Landing
Bond on Contamination
Foreign Material
|
Bonding Area/Pad |
Copper Protrusion
Crack
Chipping
Exposed Copper
Exposed Nickel
Target Material
Scratches or Brush Marks
Oxidation
Foreign Material
|
Dimensions
WxDxH |
990 x 1495 x 1700 mm (Without Auto Load/Unload Module)
2065 x 1490 x 1700 mm (With Auto Load/Unload Module)
Note: not including signal tower, signal tower height 515 mm |
Weight |
823 kg. With Auto Load/Unload Module: 989.5 kg |
Optical System
Imaging Method |
|
Camera |
|
Imaging Resolution |
|
Lighting |
|
3D Technology |
|
Field of View |
|
Inspection Performance
Imaging Speed |
|
Height Resolution |
|
Max. Solder Height |
|
Motion Table & Control
X-Axis Control |
|
Y-Axis Control |
|
Z-Axis Control |
|
X-Y Axis Resolution |
|
Z-Axis Resolution |
|
Board Handling
Max PCB Size |
|
PCB Thickness |
|
Max PCB Weight |
|
Top Clearance |
|
Bottom Clearance |
|
Edge Clearance |
|
Conveyor Height |
|
Optical System
Imaging Method |
|
Top Camera |
|
Angle Camera |
|
Imaging Resolution |
|
Lighting |
|
3D Technology |
|
Max. 3D Range |
|
Motion Table & Control
X-Axis Control |
|
Y-Axis Control |
|
Z-Axis Control |
|
X-Y Axis Resolution |
|
Board Handling
Max PCB Size |
|
PCB Thickness |
|
Max PCB Weight |
|
Top Clearance |
|
Bottom Clearance |
|
Edge Clearance |
|
Conveyor |
|
Imaging System
Camera |
|
X-ray Source |
|
Imaging Resolution |
|
Inspection Method |
|
Motion Table & Control
X-Axis Control |
|
Y-Axis Control |
|
Z-Axis Control |
|
X-Y Axis Resolution |
|
Board Handling
Max PCB Size |
|
PCB Thickness |
|
Max PCB Weight |
|
Top Clearance |
|
Bottom Clearance |
|
Edge Clearance |
|
Conveyor Height |
|
Dimensions
WxDxH |
|
Weight |
|
Power Requirement |
|
|